A nice touch in this textbook is the chapter-opening vignettes that hook your interest.
Product Tag: Xi, 493 Pages
The Physics of Submicron Lithography by Kamil A Valiev
This textbook covers both theory and hands-on exercises in equal measure.
The Physics of Submicron Lithography by Kamil A Valiev
You will find that this textbook has a logical structure that makes studying easier.